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ESC 2nd New

Category : Overhaul / 2nd / OPM New Items | Download : RenoNix ESC Profile 2020 R1.pdf

ESC 2nd New Items

Polymide ESC's are widely used on semiconductor manufacturing equipment such as AMAT, LAM, TEL.

Recently, domestic product of ESC used in ETCH process has shown fail trend during Production.

The following problem has shown during production.

◆ Cost Increase

◆ Lower Quality

◆ PM time Increase

◆ System up tie decrease

Therefore, RenoNix here to introduce an product which has qualified by other foundries.