Overhaul / 2nd / OPM New Items

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RNX Novellus OPM / 2ND New Parts List_Rev010_20240613

Category : Overhaul / 2nd / OPM New Items | Download : RenoNix Novellus OPM 2ND Parts List_2024.pdf

No.                 P/N                          Condition                      Description

1  15-10899-00 2nd New SPRING SEAL PLATE
2 02-00205-00 2nd New THERMOCOUPLE FEEDTHRU ASSY
3 02-111903-00 2nd New RF FEEDTHRU ASS'Y
4 02-141319-00 2nd New Heater ISO BOX, NEW TYPE
5 03-00313-04 2nd New CABLE ASSY,CA102-4
6 03-033871-01 2nd New CABLE ASSY RF CNTRL 228
7 03-041149-02 OPM New HARN ASSY, Laser Transmit, Right MAP
8 03-041150-02 OPM New HARN ASSY, Laser Reciecer, Right MAP
9 03-10361-00 2nd New N2/VAC INTERLOCK 72FT
10 03-10794-01 2nd New R.F Interlock 25FT
11 03-114682-03 2nd New Novellus Cable
12 03-123072-00 2nd New Interlock B/D SEQ-X
13 04-136579-00 2nd New RF Switch Kit, SEQUEL-X(SPML KIT)
14 05-140758-00 2nd New HVA Gate Valve used (With Heater Jacket)
15 05-164943-00 2nd New Assy 4-shelf CAST COOL STATION
16 10-00095-00 2nd New Manifold Gas tube
17 15-00027-02 2nd New Guide,Nozzle,Adjuster
18 15-00043-02 2nd New PLATE, ADJUSTER CERAMIC GAS
19 15-00229-00 2nd New Nut Feed Through 1/2-20UNC*.25
20 15-00309-00 2nd New PRACKET NOZZLE SUPPORT
21 15-00309-01 2nd New Hanger,Nozzle,1.50"(200MM)
22 15-00386-00 2nd New WASHER FLAT #10, NICKEL
23 15-00399-02 2nd New Serw HEX 8-32X.96 NICKEL
24 15-00399-03 2nd New Screw 8.32 x 0.55 INCH-NI Top Spindle
25 15-00399-04 2nd New SCREW 1.02 LG TOP SPINDLE
26 15-00399-05 2nd New SCREW 1.12 LG TOP SPINDLE
27 15-00410-00 2nd New WINDOW UV FILTER
28 15-00457-00 2nd New HEATER STRAP-SCREW
29 15-00475-00 2nd New INSULATOR GAS FEECLT
30 15-00558-01 2nd New Sleeve Heater Lead 2.00" Ceramic
31 15-00653-00 2nd New CLAMP HOUSING
32 15-00654-00 2nd New CLAMP
33 15-00680-00 2nd New SLEEVE- TC CERAMIC
34 15-00685-00 2nd New O-SEAL, FEED THRU, 3/8"
35 15-00686-00 2nd New Washer,Feedthru,1/2 ID,Alum
36 15-00699-02 2nd New FORK FINGER 200MM
37 15-00700-00 2nd New FORK BOTTOM PLATE
38 15-00721-00 2nd New WASHER #8, NICKEL
39 15-00729-00 2nd New CLAMP PLATE
40 15-032631-00 2nd New FLANGE KEYED
41 15-033485-00 2nd New Insert, MESC Port, Inigner
42 15-053394-02 2nd New FORK FINGER Minimum contact
43 15-100263-00 2nd New ROBOT BLADE 200MM HI PURI
44 15-100641-00 2nd New WINDOW INNER, VIEWPORT
45 15-108174-00 2nd New CUP SCREW COVER
46 15-108307-00 2nd New Clamp RF Strap
47 15-110411-00 2nd New Window Sapphire
48 15-114331-00 2nd New SCREW 1/4-20*0.5L NICKEL
49 15-11606-00 2nd New Instolator, Gas Distribution, Ceramic
50 15-119059-00 2nd New SCRW SKT HEX 1/4-20X.25,NICKL
51 15-122086-00 2nd New COVER ESC 200MM JEIDA CERAMIC
52 15-296010-00 2nd New WINDOW IMPROVED VIEWPORT, PLASTIC
53 16-00092-00 2nd New FEEDTHRU STRAP (SHORT LINE)
54 16-00098-00 2nd New Wire, Insulated, Ceramic Bead,Long
55 16-00123-00 2nd New BELLOWS WELDMENT
56 16-033732-00 2nd New Manifold 4in Vaccum/Bulkhead
57 16-033931-00 2nd New SHOWER HEAD PINNED 200MM WELDMENT
58 16-033932-00 2nd New SHOWER HEAD
59 16-041993-00 2nd New Special 4in Vaccum W/HYT Port
60 17-101596-00 2nd New FORK RETAINER
61 17-103987-00 2nd New Strap RF
62 17-110412-00 2nd New Screen ,RF Shield , Etched Short
63 17-113692-00 2nd New Bracket strap side RF Dis
64 19-00056-00 2nd New Feedthru Assy, Heater
65 19-00155-01 2nd New HBLK, 150MM, SLOT
66 19-00154-00 2nd New HBLK, 200MM
67 02-258799-00 2nd New HBLK, 200MM
68 19-00154-01 2nd New HBLK, 200MM, SLOT
69 19-024227-00 2nd New HBLK, 200MM, 24HOLE
70 19-00154-02 2nd New HBLK, 200MM, 24HOLE
71 20-00212-00 2nd New Nut,8-32UNC-2B,Alum
72 20-00221-00 2nd New WASHER, FLAT #8 ALUM
73 20-00222-00 2nd New WASHER FLAT, 1/4 ALUN
74 22-00006-00 2nd New Filter waferguard
75 22-00021-01 2nd New O-Ring, 1.984 x 0.139, Buna
76 22-00042-00 2nd New O-Ring, 7.984 x 0.139
77 22-00053-00 2nd New O-Ring, 0.676 x 0.070, Viton
78 22-00090-00 2nd New Filter waferguard
79 22-00174-00 2nd New O-Ring, 6.234 x 0.139, Exhaust Box, Viton
80 22-00236-00 2nd New O-Ring, 7.475 x 0.275, Viton
81 22-00239-00 2nd New O-Ring, 5.984 x 0.139, Viton
82 22-00324-00 2nd New SEAL- LIP(EXT)
83 22-00344-00 2nd New O-Ring, 0.364 x 0.070, Viton
84 22-00345-00 2nd New O-Ring, 3/8 OD Tube QC F
85 22-00361-00 2nd New O-Ring, 31.12 x 0.275, Viton
86 22-00391-00 2nd New O-Ring, 0.864 x 0.070, Viton
87 22-00608-00 2nd New O-Ring, 1.484 x 0.139
88 22-00656-00 2nd New O-Ring, 7.474 x 0.139, (2-264  Kalrez)
89 22-026373-00 2nd New Filter male inlet, female outlet(M/F VCR 1/4")
90 22-10018-00 2nd New O-Ring, 15.955 x 0.210, Face Plate
91 22-10068-00 2nd New KIMURA O-Ring K23X AS383
92 22-10117-00 2nd New O-Ring, 7.234 x 0.139, Valve Seat
93 22-110615-00 2nd New O-Ring 2-249, VITON 747
94 27-00010-01 2nd New TC,TYPE'J',RIGID,1/8 DIA x 12L OMEGA
95 27-00079-00 2nd New THERMOCOUPLE TYPE J 1/16"
96 27-00117-01 2nd New CNTRLR,TEMP,'E' TYPE INVENSYS
97 27-00127-00 2nd New Thermocouple Type E LG
98 27-00179-00 2nd New Elbow Union 3/8" O-seal
99 27-034083-01 2nd New Actulator, Hoist
100 27-10114-00 2nd New Feedthru Assembly heater
101 27-277312-00 2nd New Controller over temp type-J
102 31-00114-00 2nd New RELAY,SOLID STATE,90A IDEC CORPORATION
103 34-103697-00 2nd New Relay SSR, 280AC,12A,3-30VDC
104 38-128003-00 2nd New Novellus Cable
105 60-00019-00 2nd New Seal Assy NW25
106 60-00026-00 2nd New Seal Assy NW100
107 60-00039-00 2nd New Seal Assy NW40
108 6030-01186 2nd New BALL BUSHING BEARING
109 76-268563-00 2nd New Novellus Cable
110 C2 Dual Sequal 2nd New Novellus C2 Dual Sequal RF Clean Kit
111 E19000940 2nd New VARIAN: VIISION® Drive Shaft
112 HA-FF23BG1 2nd New MANUAL PORT AC SERVER MOTOR
113 PK-ST8W-001 2nd New 8" TC Wafer
114 SS-601-PC OPM New Port Connector
115 SS-6BHT-60 OPM New L=155, 3/8" Tube end type teflon hose
116 SS-6BHT-72 OPM New L=185, 3/8" Tube end type teflon hose
117 15-250878-00 2nd New MOER Screw
118 16-033932-00 2nd New SHOWER HEAD