RNX Novellus OPM / 2ND New Parts List_Rev010_20240613
Category : Overhaul / 2nd / OPM New Items | Download : RenoNix Novellus OPM 2ND Parts List_2024.pdf
No. P/N Condition Description
1 | 15-10899-00 | 2nd New | SPRING SEAL PLATE |
2 | 02-00205-00 | 2nd New | THERMOCOUPLE FEEDTHRU ASSY |
3 | 02-111903-00 | 2nd New | RF FEEDTHRU ASS'Y |
4 | 02-141319-00 | 2nd New | Heater ISO BOX, NEW TYPE |
5 | 03-00313-04 | 2nd New | CABLE ASSY,CA102-4 |
6 | 03-033871-01 | 2nd New | CABLE ASSY RF CNTRL 228 |
7 | 03-041149-02 | OPM New | HARN ASSY, Laser Transmit, Right MAP |
8 | 03-041150-02 | OPM New | HARN ASSY, Laser Reciecer, Right MAP |
9 | 03-10361-00 | 2nd New | N2/VAC INTERLOCK 72FT |
10 | 03-10794-01 | 2nd New | R.F Interlock 25FT |
11 | 03-114682-03 | 2nd New | Novellus Cable |
12 | 03-123072-00 | 2nd New | Interlock B/D SEQ-X |
13 | 04-136579-00 | 2nd New | RF Switch Kit, SEQUEL-X(SPML KIT) |
14 | 05-140758-00 | 2nd New | HVA Gate Valve used (With Heater Jacket) |
15 | 05-164943-00 | 2nd New | Assy 4-shelf CAST COOL STATION |
16 | 10-00095-00 | 2nd New | Manifold Gas tube |
17 | 15-00027-02 | 2nd New | Guide,Nozzle,Adjuster |
18 | 15-00043-02 | 2nd New | PLATE, ADJUSTER CERAMIC GAS |
19 | 15-00229-00 | 2nd New | Nut Feed Through 1/2-20UNC*.25 |
20 | 15-00309-00 | 2nd New | PRACKET NOZZLE SUPPORT |
21 | 15-00309-01 | 2nd New | Hanger,Nozzle,1.50"(200MM) |
22 | 15-00386-00 | 2nd New | WASHER FLAT #10, NICKEL |
23 | 15-00399-02 | 2nd New | Serw HEX 8-32X.96 NICKEL |
24 | 15-00399-03 | 2nd New | Screw 8.32 x 0.55 INCH-NI Top Spindle |
25 | 15-00399-04 | 2nd New | SCREW 1.02 LG TOP SPINDLE |
26 | 15-00399-05 | 2nd New | SCREW 1.12 LG TOP SPINDLE |
27 | 15-00410-00 | 2nd New | WINDOW UV FILTER |
28 | 15-00457-00 | 2nd New | HEATER STRAP-SCREW |
29 | 15-00475-00 | 2nd New | INSULATOR GAS FEECLT |
30 | 15-00558-01 | 2nd New | Sleeve Heater Lead 2.00" Ceramic |
31 | 15-00653-00 | 2nd New | CLAMP HOUSING |
32 | 15-00654-00 | 2nd New | CLAMP |
33 | 15-00680-00 | 2nd New | SLEEVE- TC CERAMIC |
34 | 15-00685-00 | 2nd New | O-SEAL, FEED THRU, 3/8" |
35 | 15-00686-00 | 2nd New | Washer,Feedthru,1/2 ID,Alum |
36 | 15-00699-02 | 2nd New | FORK FINGER 200MM |
37 | 15-00700-00 | 2nd New | FORK BOTTOM PLATE |
38 | 15-00721-00 | 2nd New | WASHER #8, NICKEL |
39 | 15-00729-00 | 2nd New | CLAMP PLATE |
40 | 15-032631-00 | 2nd New | FLANGE KEYED |
41 | 15-033485-00 | 2nd New | Insert, MESC Port, Inigner |
42 | 15-053394-02 | 2nd New | FORK FINGER Minimum contact |
43 | 15-100263-00 | 2nd New | ROBOT BLADE 200MM HI PURI |
44 | 15-100641-00 | 2nd New | WINDOW INNER, VIEWPORT |
45 | 15-108174-00 | 2nd New | CUP SCREW COVER |
46 | 15-108307-00 | 2nd New | Clamp RF Strap |
47 | 15-110411-00 | 2nd New | Window Sapphire |
48 | 15-114331-00 | 2nd New | SCREW 1/4-20*0.5L NICKEL |
49 | 15-11606-00 | 2nd New | Instolator, Gas Distribution, Ceramic |
50 | 15-119059-00 | 2nd New | SCRW SKT HEX 1/4-20X.25,NICKL |
51 | 15-122086-00 | 2nd New | COVER ESC 200MM JEIDA CERAMIC |
52 | 15-296010-00 | 2nd New | WINDOW IMPROVED VIEWPORT, PLASTIC |
53 | 16-00092-00 | 2nd New | FEEDTHRU STRAP (SHORT LINE) |
54 | 16-00098-00 | 2nd New | Wire, Insulated, Ceramic Bead,Long |
55 | 16-00123-00 | 2nd New | BELLOWS WELDMENT |
56 | 16-033732-00 | 2nd New | Manifold 4in Vaccum/Bulkhead |
57 | 16-033931-00 | 2nd New | SHOWER HEAD PINNED 200MM WELDMENT |
58 | 16-033932-00 | 2nd New | SHOWER HEAD |
59 | 16-041993-00 | 2nd New | Special 4in Vaccum W/HYT Port |
60 | 17-101596-00 | 2nd New | FORK RETAINER |
61 | 17-103987-00 | 2nd New | Strap RF |
62 | 17-110412-00 | 2nd New | Screen ,RF Shield , Etched Short |
63 | 17-113692-00 | 2nd New | Bracket strap side RF Dis |
64 | 19-00056-00 | 2nd New | Feedthru Assy, Heater |
65 | 19-00155-01 | 2nd New | HBLK, 150MM, SLOT |
66 | 19-00154-00 | 2nd New | HBLK, 200MM |
67 | 02-258799-00 | 2nd New | HBLK, 200MM |
68 | 19-00154-01 | 2nd New | HBLK, 200MM, SLOT |
69 | 19-024227-00 | 2nd New | HBLK, 200MM, 24HOLE |
70 | 19-00154-02 | 2nd New | HBLK, 200MM, 24HOLE |
71 | 20-00212-00 | 2nd New | Nut,8-32UNC-2B,Alum |
72 | 20-00221-00 | 2nd New | WASHER, FLAT #8 ALUM |
73 | 20-00222-00 | 2nd New | WASHER FLAT, 1/4 ALUN |
74 | 22-00006-00 | 2nd New | Filter waferguard |
75 | 22-00021-01 | 2nd New | O-Ring, 1.984 x 0.139, Buna |
76 | 22-00042-00 | 2nd New | O-Ring, 7.984 x 0.139 |
77 | 22-00053-00 | 2nd New | O-Ring, 0.676 x 0.070, Viton |
78 | 22-00090-00 | 2nd New | Filter waferguard |
79 | 22-00174-00 | 2nd New | O-Ring, 6.234 x 0.139, Exhaust Box, Viton |
80 | 22-00236-00 | 2nd New | O-Ring, 7.475 x 0.275, Viton |
81 | 22-00239-00 | 2nd New | O-Ring, 5.984 x 0.139, Viton |
82 | 22-00324-00 | 2nd New | SEAL- LIP(EXT) |
83 | 22-00344-00 | 2nd New | O-Ring, 0.364 x 0.070, Viton |
84 | 22-00345-00 | 2nd New | O-Ring, 3/8 OD Tube QC F |
85 | 22-00361-00 | 2nd New | O-Ring, 31.12 x 0.275, Viton |
86 | 22-00391-00 | 2nd New | O-Ring, 0.864 x 0.070, Viton |
87 | 22-00608-00 | 2nd New | O-Ring, 1.484 x 0.139 |
88 | 22-00656-00 | 2nd New | O-Ring, 7.474 x 0.139, (2-264 Kalrez) |
89 | 22-026373-00 | 2nd New | Filter male inlet, female outlet(M/F VCR 1/4") |
90 | 22-10018-00 | 2nd New | O-Ring, 15.955 x 0.210, Face Plate |
91 | 22-10068-00 | 2nd New | KIMURA O-Ring K23X AS383 |
92 | 22-10117-00 | 2nd New | O-Ring, 7.234 x 0.139, Valve Seat |
93 | 22-110615-00 | 2nd New | O-Ring 2-249, VITON 747 |
94 | 27-00010-01 | 2nd New | TC,TYPE'J',RIGID,1/8 DIA x 12L OMEGA |
95 | 27-00079-00 | 2nd New | THERMOCOUPLE TYPE J 1/16" |
96 | 27-00117-01 | 2nd New | CNTRLR,TEMP,'E' TYPE INVENSYS |
97 | 27-00127-00 | 2nd New | Thermocouple Type E LG |
98 | 27-00179-00 | 2nd New | Elbow Union 3/8" O-seal |
99 | 27-034083-01 | 2nd New | Actulator, Hoist |
100 | 27-10114-00 | 2nd New | Feedthru Assembly heater |
101 | 27-277312-00 | 2nd New | Controller over temp type-J |
102 | 31-00114-00 | 2nd New | RELAY,SOLID STATE,90A IDEC CORPORATION |
103 | 34-103697-00 | 2nd New | Relay SSR, 280AC,12A,3-30VDC |
104 | 38-128003-00 | 2nd New | Novellus Cable |
105 | 60-00019-00 | 2nd New | Seal Assy NW25 |
106 | 60-00026-00 | 2nd New | Seal Assy NW100 |
107 | 60-00039-00 | 2nd New | Seal Assy NW40 |
108 | 6030-01186 | 2nd New | BALL BUSHING BEARING |
109 | 76-268563-00 | 2nd New | Novellus Cable |
110 | C2 Dual Sequal | 2nd New | Novellus C2 Dual Sequal RF Clean Kit |
111 | E19000940 | 2nd New | VARIAN: VIISION® Drive Shaft |
112 | HA-FF23BG1 | 2nd New | MANUAL PORT AC SERVER MOTOR |
113 | PK-ST8W-001 | 2nd New | 8" TC Wafer |
114 | SS-601-PC | OPM New | Port Connector |
115 | SS-6BHT-60 | OPM New | L=155㎝, 3/8" Tube end type teflon hose |
116 | SS-6BHT-72 | OPM New | L=185㎝, 3/8" Tube end type teflon hose |
117 | 15-250878-00 | 2nd New | MOER Screw |
118 | 16-033932-00 | 2nd New | SHOWER HEAD |